Auger Electron Spectroscopy (2 days)  
       
    AES is used to determine the atoms present at a surface, their concentrations, their chemistry, and their lateral and depth distributions.  
    Hours: 8:30am-5pm, lunch on your own. Participants will be provided with printed notes.  
       
    Day 1:    
       
      Introduction ö terminology, surfaces, types of surfaces. 0.5 hour  
      The principles of AES ö production of Auger electrons, peak labeling, ionization cross-sections, handbooks, books, backscattering, surface sensitivity, information depth, sample handling. 2 hours  
      Qualitative analysis ö direct and derivative spectra, identification of elements, energy resolution, peak widths, chemical effects, plasmons, cross transitions, ion-excited Auger transitions. 2 hours  
      Quantitative analysis ö Auger intensities, sensitivity factors, detection limit, lineshapes, analyzer transmission, electron multiplier effects, matrix factors, average matrix sensitivity factors, diffraction, angle of incidence and emission, standard spectra, signal-to-noise. 3 hours  
      Artifacts ö ionization loss peaks, electron beam damage. 0.5 hours  
       
       
    Day 2:    
       
   
Instrumentation ö cylindrical mirror analyzer (CMA), field emission electron source, hemispherical type analyzer (HSA), modes of operation, electron detection, pulse counting, other electron sources, vacuum system, samples, other types of analyzers, scattering in analyzers, energy scale calibration. 3 hours  
   
Imaging ö scanning electron microscopy, acceptance area, locating regions of interest, corrections for topography and backscattering, beam energy, spatial resolution, comparison of analyzers, electron energy loss (EELS) imaging, ratioed scatter diagrams, line scans. 2 hours  
   
Insulating samples ö charge control methods, effects on images and spectra, use of low energy ion beam. 1 hour  
   
Data acquisition, processing and depth profiling ö spectrum subtraction, sputtering, crater edge profiling, angle resolved AES, factor analysis, linear least squares fitting, sample rotation, mechanical methods. 2 hours  
   
Instrument selection and summary ö factors to consider, general summary. 0.2 hours