Data Processing in XPS/ESCA and AES (1 day)  
       
    XPS and AES are used to determine the atoms present at a surface, and their concentrations, chemistries, and lateral and depth distributions. This course will show attendees how to process and evaluate XPS and AES spectra:  
       
      Spectra ö the many features present in spectra will be described.  
      Background subtraction methods will be described and compared.  
      Shapes of peaks will be described and approaches for curve fitting will be illustrated.  
      Approaches for quantitative analysis will be demonstrated and errors illustrated.  
      Data processing methods to improve images will be demonstrated.  
   
Data processing methods for near-surface, non-destructive depth profiling will be illustrated.  
   
Data processing methods to remove peak overlap problems, separate different chemical states, and improve signal-to-noise in sputter depth profiles will be demonstrated.  
   
Spectra ö the many features present in spectra will be described.  
       
    Hours: 8:30 am-5pm, Lunch on your own  
    Printed notes will be provided to participants