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SEM Basics

Why use an electron microscope?

A traditional light microscope uses visible light to resolve an image. The wavelength of visible light ranges from about 400-700 nanometers. These wavelengths give the light microscope physical limitations of 500-1000 times magnification and 200 nanometer resolution. Electrons have both particle and wave-like properties. When accelerated through a voltage, electrons can have a wavelength on the order of 0.1 nanometers. This allows much higher resolution, and magnification. The scanning electron microscope (SEM) that is used in this program is capable of 20,000 times magnification and about 10 nanometer resolution.

General SEM Design Features

Below is a simple schematic drawing of an SEM:

(Image courtesy of Museum of Science)

A SEM functions in a similar way to a traditional light microscope. An electron gun generates electrons, which are then accelerated by an electric potential. There are then condensing lens that collimate the electrons into small beam. While lenses in an optical system are made of curved pieces of plastic or glass, in a SEM a lens is made by a coil of current-carrying wire. This coil makes a magnetic field which exerts a force on the moving electrons.

After the condensing lens is another coil which scans the beam of electrons over the sample. There is a final objective lens that focuses the beam to a small spot on the sample. The electron beam hits the sample and causes secondary electrons to leave the sample. The secondary electrons hit a detector which generates an electrical signal. This electrical signal is processed by a computer into an image. All the SEM components are contained inside a vaccum chamber to minimize electron-gas interactions.

 

The UO TTSEM program would like to recognize the following sponsors: